Metal Process (Societe a Responsabilite Limitee)
Patent Owner
Stats
- 2 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 18, 2002 most recent publication
Details
- 2 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 111 Total Citation Count
- Jan 22, 1992 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
6407359 Method of producing individual plasmas in order to create a uniform plasma for a work surface, and apparatus for producing such a plasmaAug 02, 00Jun 18, 02[B23K]
6403490 Method of producing a plasma by capacitive-type discharges with a multipole barrier, and apparatus for implementing such a methodOct 19, 00Jun 11, 02[C23C, H01L, H05H]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
5666023 Device for producing a plasma, enabling microwave propagation and absorption zones to be dissociated having at least two parallel applicators defining a propogation zone and an exciter placed relative to the applicatorExpiredNov 02, 95Sep 09, 97[H05H]
5536914 Device for exciting a plasma to electron cyclotron resonance by means of a wire applicator of a static magnetic field and of a microwave fieldExpiredFeb 25, 94Jul 16, 96[B23K]
5216329 Device for distributing a microwave energy for exciting a plasmaExpiredJan 22, 92Jun 01, 93[H05H]
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